Series 3000 LV 800/1000

This is the Parylene system. It is a modular system divided into two parts: chamber module and evaporator module.

Dimensions:

L: 2600mm W: 960 H: 1460mm

Weight:

~ 450 KG

Volume:

800 / 1000 litres

Process chamber:

1150mm Ø H: 600mm (800 Liter), 1000mm Ø H: 1100

Plasma source:

2,45GHz, 1200 Watt

Inclusive:

1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible

Cooling system:

8 liter (electromechanical Cool-trap)

Vacuum connection:

DIN 63 ISO-KF

Venting:

electromagnetic solenoid valve

Pump system:

75m³/h

Electrical connection:

3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW

Kontakt aufnehmen und Beratung erhalten

If you have any questions about our services and offers, you can use the following form! We will contact you immediately.

Plasma Parylene Systems GmbH

Dorfstr. 3 , 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

© 2022 – Plasma Parylene Systems GmbH – All rights reserved.

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