Series 3000 Standard System

Made for industrial usage. A thoroughly tested system that can meet large and demanding production volumes.

Standard production tool of the series 2000 (without plasma) series 3000 with plasma support.


Modular assembly and variable chamber size distinguish this thoroughly tested production- and coating machine.

Made for industrial usage.

Can meet large and demanding production volumes through larger chambers.


L: 2095mm W: 800 H: 1450mm


~ 300 KG


140/200/300/600/750/800/1000 Liter

Process chamber:

500mm Ø H: 700mm (140 Liter), 600mm Ø / H: 700mm (200 Liter), 700mm Ø, H: 800mm (300 Liter)

Plasma source:

2,45GHz, 1200 Watt


1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible

Cooling system:

8 liter (electromechanical Cool-trap)

Vacuum connection:



electromagnetic solenoid valve

Pump system:


Electrical connection:

3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW

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Plasma Parylene Systems GmbH

Dorfstr. 3, 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

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