Series 3000 Standard System
Made for industrial usage. A thoroughly tested system that can meet large and demanding production volumes.
Standard production tool of the series 2000 (without plasma) series 3000 with plasma support.
Modular assembly and variable chamber size distinguish this thoroughly tested production- and coating machine.
Made for industrial usage.
Can meet large and demanding production volumes through larger chambers.
L: 2095mm W: 800 H: 1450mm
~ 300 KG
500mm Ø H: 700mm (140 Liter), 600mm Ø / H: 700mm (200 Liter), 700mm Ø, H: 800mm (300 Liter)
2,45GHz, 1200 Watt
1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
8 liter (electromechanical Cool-trap)
DIN 40 ISO-KF
electromagnetic solenoid valve
3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
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