AL series plasma systems
AL stands for aluminum chamber. It is mainly used in the semiconductor, solar, plastics and electronics industries.
Breaking boundaries with
Alpha plasma
The owner and managing director, Hans-Dieter Voss, has a degree in physics and engineering as well as more than 35 years of experience in the field of plasma technology, low-pressure polymer coating and development of those technologies.
You too can benefit from our experience and professional know-how
Let our experts advise you.
We have often been able to custom-manufacture machines and systems that our customers thought were not feasible.
We are happy to develop a tailor-made solution that perfectly fits your requirements.
We develop your solution both on the system and on the process side.
Our powerful plasma system and special accessories
Plasma systems:
AL 18 Tabletop Unit
Our smallest AL-system.
AL 18 (19 inch rack)
A 19 inch rack with two frequencies for polymerization.
AL 36 Tabletop Unit
Slightly bigger version of the AL18 with more options and load capacity.
AL 76 Tabletop Unit
A space-saving system designed for smaller production facilities and laboratories. Available as compact or tabletop.
AL 76/AL 100 Compact
Ideal for medium sized substrates or PCB plates.
AL140 / AL160 / AL300
Offers 3 options for chamber size, depending on the size of substrates or process speed needed.
AL 235
With automated door and adjustable work height for easier loading.
AL 800 Compact
The absolute biggest AL-system we have to offer. For the largest substrates and quantities.
Plasma equipment of series Q
The Q stands for quartz glass chambers.
Q150 (Tabletop Unit)
Easy to operate and simple to load. Our Q-series provides fast and reliable plasma processing.
Q 240S
A system with the diameter of our Q240S but with reduced chamber depth for the sake of saving space.
Q 240
The biggest system in our Q-series. Perfect for multiple Wafers with sizes up to 200mm diameter.
Desmearing System AL 250 Control Active
Modified machine.
Special accessories:
ECR rack
Concentrated, more effective surface treatment and plasma generation.
Heating table
This table allows the substrates placed on it to remain above a certain temperature level during coating or plasma treatment. Can be combined with wafer holders.
Cooling table
Similar to the heating table, this extra allows the substrates to be cooled as needed or maintained at a specific temperature level during treatment.
Wafer holder
We offer several sizes of wafer holders that can be placed on our heating/cooling tables to hold wafers in place during ultracleaning or analysis.
Our system product catalogue
Download our product catalogue by clicking on the following button: “DOWNLOAD PRODUCT CATALOGUE”.
Get in touch with us for advice
If you have any questions about our services and offers, you can use the following form! We will get back to you as soon as possible.
