The parylene coating process in detail

Course of a parylene coating process

The process takes place in three stages:


Dipara-xylylene dimer

2. Pyrolysis

Para-xylylene monomer

3. Condensation

Polypara-xylylene polymer

As a result of the pyrolysis of the gas, the next step is aimed at splitting the monomeric form of the dimer.

Finally, the gas is separated at room temperature inside a coating chamber.

This leaves a transparent and also very thin and homogeneous polymer film on the surfaces.

  • Deposition rates > 0.007 mm/h
  • Layer thicknesses 0.1 to 100 µm
  • Primers and dimers (raw materials: C, N, D, F, AF4)

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Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

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