AL 18 (19 inch rack)

A 19 inch rack with two frequencies for polymerization.

Dimensions:

L: 530mm W: 600mm H: 1800mm

Weight:

95 KG

Volume:

18 Liter

Process chamber:

aluminium, L: 250mm W: 290mm H:250mm

Microwave output:

2,45 GHz / 50 - 1200 Watt

Inclusive:

1 gas channel (gas distribution system inside the process chamber), up to 3 channels available

Substrate holder (optional):

aluminium, custom design possible

Vacuum connection:

DN 25 ISO-KF

Venting:

electromagnetic solenoid valve

Pump system:

15-35 m³/h

Chamber door:

hinged-type with viewing port

Kontakt aufnehmen und Beratung erhalten

If you have any questions about our services and offers, you can use the following form! We will contact you immediately.

Plasma Parylene Systems GmbH

Dorfstr. 3 , 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

© 2022 – Plasma Parylene Systems GmbH – All rights reserved.

Scroll to Top