Modified machine.
Dimensions: | L: 550mm W: 1900mm H: 900mm |
Weight: | 180 KG |
Volume: | 250 Liter |
Porcess chamber: | aluminum with panel holder: |
panel holder : L: 400mm B: 650mm H: 800mm | |
circuit boards: up to 4/5 panels mit 18x24" or 20x24" | |
LF-output (Low Frequency): | operating frequency = 40 KHz, up to 2000 Watt |
Microwave output: | 2,45 GHz / 50 - 1200 Watt |
Inclusive: | 1 gas channel (gas distribution system inside the process chamber), up to 6 channels available |
Substrate holder (optional): | aluminium, custom design possible |
Vacuum connection: | DN 63 ISO-KF |
Venting: | electromagnetic solenoid valve |
Pump system: | up to 250m³/h |
Chamber door: | hinged-type with viewing port |
If you have any questions about our services and offers, you can use the following form! We will contact you immediately.
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