Modified machine.
| Dimensions: | L: 550mm W: 1900mm H: 900mm |
| Weight: | 180 KG |
| Volume: | 250 Liter |
| Porcess chamber: | aluminum with panel holder: |
panel holder : L: 400mm B: 650mm H: 800mm | |
circuit boards: up to 4/5 panels mit 18x24" or 20x24" | |
| LF-output (Low Frequency): | operating frequency = 40 KHz, up to 2000 Watt |
| Microwave output: | 2,45 GHz / 50 - 1200 Watt |
| Inclusive: | 1 gas channel (gas distribution system inside the process chamber), up to 6 channels available |
| Substrate holder (optional): | aluminium, custom design possible |
| Vacuum connection: | DN 63 ISO-KF |
| Venting: | electromagnetic solenoid valve |
| Pump system: | up to 250m³/h |
| Chamber door: | hinged-type with viewing port |
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