Modified machine, in bigger dimensions.
Dimensions: | L: 1800mm W: 1500mm H: 1700mm |
Weight: | 620 KG |
Volume: | 900 Liter |
Porcess chamber: | aluminum with electron cage: |
circuit boards: up to 18 panels mit 18x24" or 20x24" | |
LF-output (Low Frequency): | operating frequency = 40 KHz, up to 10 kW |
Microwave output: | 2,45 GHz / 50 - 1200 Watt |
Inclusive: | 3 gas channel (gas distribution system inside the process chamber), up to 7 channels available |
Substrate holder (optional): | aluminium, custom design possible |
Vacuum connection: | DN 250 ISO-KF |
Venting: | electromagnetic solenoid valve |
Pump system: | up to 600m³/h |
Chamber door: | hinged-type with viewing port |
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