Desmearing System AL 900 Control Active

Modified machine, in bigger dimensions.

Dimensions:
L: 1800mm W: 1500mm H: 1700mm
Weight:
620 KG
Volume:
900 Liter
Porcess chamber:
aluminum with electron cage:
circuit boards: up to 18 panels mit 18x24" or 20x24"
LF-output (Low Frequency):
operating frequency = 40 KHz, up to 10 kW
Microwave output:
2,45 GHz / 50 - 1200 Watt
Inclusive:
3 gas channel (gas distribution system inside the process chamber), up to 7 channels available
Substrate holder (optional):
aluminium, custom design possible
Vacuum connection:
DN 250 ISO-KF
Venting:
electromagnetic solenoid valve
Pump system:
up to 600m³/h
Chamber door:
hinged-type with viewing port

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