The biggest system in our Q-series. Perfect for multiple Wafers with sizes up to 200mm diameter.
L: 760mm W: 775mm H: 775mm
quartz glass, 240mm Ø, B: 450mm
2,45 GHz / 50 - 1200 Watt
1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
|Substrate holder (optional):|
aluminium, custom design possible
DN 40 ISO-KF
electromagnetic solenoid valve
up to 40m³/h
you can choose between hinged-type with viewing port and drawer door with attached support rods
up to 200mm, at a number of 50 wafers
Kontakt aufnehmen und Beratung erhalten
If you have any questions about our services and offers, you can use the following form! We will contact you immediately.