The biggest system in our Q-series. Perfect for multiple Wafers with sizes up to 200mm diameter.
Dimensions: | L: 760mm W: 775mm H: 775mm |
Weight: | 100 KG |
Volume: | 20 Liter |
Process chamber: | quartz glass, 240mm Ø, B: 450mm |
Microwave output: | 2,45 GHz / 50 - 1200 Watt |
Inclusive: | 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available |
Substrate holder (optional): | aluminium, custom design possible |
Vacuum connection: | DN 40 ISO-KF |
Venting: | electromagnetic solenoid valve |
Pump system: | up to 40m³/h |
Chamber door: | you can choose between hinged-type with viewing port and drawer door with attached support rods |
Wafer size: | up to 200mm, at a number of 50 wafers |
If you have any questions about our services and offers, you can use the following form! We will contact you immediately.
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