AL 18 Tabletop Unit

Our smallest AL-system.

Dimensions:	L: 530mm W: 600mm H: 550mm
Weight:	80 KG
Volume:	18 Liter
Process chamber:	aluminium, L: 250mm W: 290mm H:250mm
Microwave output:	2,45 GHz / 50 - 1200 Watt
Inclusive:	1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional):	aluminium, custom design possible
Vacuum connection:	DN 25 ISO-KF
Venting:	electromagnetic solenoid valve
Pump system:	15-35 m³/h
Chamber door:	hinged-type with viewing port

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