AL 235/AL285

With automated door and adjustable work height for easier loading.

Dimensions:
L: 1200mm W: 2700mm H: 1850mm
Weight:
380 KG
Volume:
235 Liter
Process chamber:
L: 650 W: 650 H: 550
Microwave output:
2,45 GHz / 1200 and 1450 Watt
Inclusive:
1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional):
aluminium, custom design possible
Vacuum connection:
DN 100 ISO-K
Venting:
electromagnetic solenoid valve
Pump system:
50 -600 m³/h process-dependent
Chamber door:
Automatic door

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