AL 235

With automated door and adjustable work height for easier loading.


L: 1200mm W: 2700mm H: 1850mm


380 KG


235 Liter

Process chamber:

L: 650 W: 650 H: 550

Microwave output:

2,45 GHz / 1200 and 1450 Watt


1 gas channel (gas distribution system inside the process chamber), up to 3 channels available

Substrate holder (optional):

aluminium, custom design possible

Vacuum connection:

DN 100 ISO-K


electromagnetic solenoid valve

Pump system:

50 -600 m³/h process-dependent

Chamber door:

Automatic door

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Plasma Parylene Systems GmbH

Dorfstr. 3, 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

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