AL 36 Tabletop Unit

Sligtly bigger version of the AL18 with more options and load capacity.

Dimensions:

L: 680mm W: 630mm H: 650mm

Weight:

110 KG

Volume:

36 Liter

Process chamber:

aluminium, L: 350mm W: 320mm H: 320mm

Microwave output:

2,45 GHz / 50 - 1200 Watt

Inclusive:

1 gas channel (gas distribution system inside the process chamber), up to 3 channels available

Substrate holder (optional):

aluminium, custom design possible

Vacuum connection:

DN 25 ISO-KF

Venting:

electromagnetic solenoid valve

Pump system:

15-65 m³/h

Chamber door:

hinged-type with viewing port

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If you have any questions about our services and offers, you can use the following form! We will contact you immediately.

Plasma Parylene Systems GmbH

Dorfstr. 3, 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

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