Dimensions:

680 x 771 x 597 mm

Weight:

85 KG

Volume:

21 Liters

Process chamber:

quartz glass, 240mm Ø, B: 450mm

Microwave output:

2,45 GHz / 50 - 1200 Watts

Inclusive:

1 gas channel (gas distribution system inside the process chamber), up to 3 channels available1 Gaskanal (Gasverteilungssystem innerhalb der Kammer, bis zu 3 Gaskanäle sind möglich)

Substrate holder (optional):

aluminium, custom design possible

Vacuum connection:

DN 40 ISO-KF

Venting:

electromagnetic solenoid valve

Pump system:

up to 40m³/h

Chamber door:

you can choose between hinged-type with viewing port and drawer door with attached support rods

Wafer size:

up to 200mm, at a number of 50 wafers