Series 3000 LV 600/700

This is the Parylene system. It is a modular system divided into two parts: chamber module and evaporator module.

Dimensions:

L: 2400mm W: 960 H: 1460mm

Weight:

~ 350 KG

Volume:

600 / 700 Liter

Process chamber:

800mm Ø H: 1100mm (600 Liter) / 1300mm (700 Liter)

Plasma source:

2,45GHz, 1200 Watt

Inclusive:

1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible

Cooling system:

8 liter (electromechanical Cool-trap)

Vacuum connection:

DIN 63 ISO-KF

Venting:

electromagnetic solenoid valve

Pump system:

75m³/h

Electrical connection:

3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW

Kontakt aufnehmen und Beratung erhalten

If you have any questions about our services and offers, you can use the following form! We will contact you immediately.

Plasma Parylene Systems GmbH

Dorfstr. 3 , 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

© 2022 – Plasma Parylene Systems GmbH – All rights reserved.

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