Series 3000 Cleanroom System

Developed for applications which have to be executed in clean rooms.


Modular assembly and variable chamber sizes.

Countless options like turntables or different holders for substrates.

Loading of the process chamber takes place from the clean room.

Unloading through the airlock door in the gray room.


L: 2095mm W: 800 H: 1450mm


~ 300 KG


140 / 200 / 300 litres

Process chamber:

500mm Ø H: 700mm (140 Liter), 600mm Ø / H: 700mm (200 Liter), 700mm Ø, H: 800mm (300 Liter)

Plasma source:

2,45GHz, 1200 Watt


1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible

Cooling system:

8 liter (electromechanical Cool-trap)

Vacuum connection:



electromagnetic solenoid valve

Pump system:


Electrical connection:

3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW

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If you have any questions about our services and offers, you can use the following form! We will contact you immediately.

Plasma Parylene Systems GmbH

Dorfstr. 3, 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

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