Series 3000 Cleanroom System
Developed for applications which have to be executed in clean rooms.
Modular assembly and variable chamber sizes.
Countless options like turntables or different holders for substrates.
Loading of the process chamber takes place from the clean room.
Unloading through the airlock door in the gray room.
L: 2095mm W: 800 H: 1450mm
~ 300 KG
140 / 200 / 300 litres
500mm Ø H: 700mm (140 Liter), 600mm Ø / H: 700mm (200 Liter), 700mm Ø, H: 800mm (300 Liter)
2,45GHz, 1200 Watt
1 gas channel (gas distribution system inside the process chamber), up to 3 channels possible
8 liter (electromechanical Cool-trap)
DIN 40 ISO-KF
electromagnetic solenoid valve
3/N/PE AC 50Hz 400 V / 240 V, max. 8.5 KW
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