AL140 / AL160 / AL300

Offers 3 options for chamber size, depending on the size of substrates or process speed needed.

Dimensions:
L: 1050mm W: 800mm H: 2020mm
Weight:
195 KG
Volume:
140/160/300 Liter
Process chamber:
aluminium, L: 400mm W: 480mm H: 520mm
Microwave output:
2,45 GHz / 50 - 1200 Watt
Inclusive:
1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
Substrate holder (optional):
aluminium, custom design possible
Vacuum connection:
DN 63 ISO-KF
Venting:
electromagnetic solenoid valve
Pump system:
up to 250m³/h (integrated)
Chamber door:
you can choose between hinged-type with viewing port, drawer door or universal door

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