AL140 / AL160 / AL300
Offers 3 options for chamber size, depending on the size of substrates or process speed needed.
| Dimensions: | L: 1050mm W: 800mm H: 2020mm |
| Weight: | 195 KG |
| Volume: | 140/160/300 Liter |
| Process chamber: | aluminium, L: 400mm W: 480mm H: 520mm |
| Microwave output: | 2,45 GHz / 50 - 1200 Watt |
| Inclusive: | 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available |
| Substrate holder (optional): | aluminium, custom design possible |
| Vacuum connection: | DN 63 ISO-KF |
| Venting: | electromagnetic solenoid valve |
| Pump system: | up to 250m³/h (integrated) |
| Chamber door: | you can choose between hinged-type with viewing port, drawer door or universal door |
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