Offers 3 options for chamber size, depending on the size of substrates or process speed needed.
Dimensions: | L: 1050mm W: 800mm H: 2020mm |
Weight: | 195 KG |
Volume: | 140/160/300 Liter |
Process chamber: | aluminium, L: 400mm W: 480mm H: 520mm |
Microwave output: | 2,45 GHz / 50 - 1200 Watt |
Inclusive: | 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available |
Substrate holder (optional): | aluminium, custom design possible |
Vacuum connection: | DN 63 ISO-KF |
Venting: | electromagnetic solenoid valve |
Pump system: | up to 250m³/h (integrated) |
Chamber door: | you can choose between hinged-type with viewing port, drawer door or universal door |
If you have any questions about our services and offers, you can use the following form! We will contact you immediately.
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