AL 800 Compact

The absolute biggest AL-system we have to offer. For the largest substrates and quantities.

Dimensions:

L: 1200mm W: 900mm H: 1800mm

Weight:

300 KG

Volume:

800 Liter

Process chamber:

L: 900 W: 920 H: 900

Microwave output:

2,45 GHz / 50 - 1200 Watt

Inclusive:

1 gas channel (gas distribution system inside the process chamber), up to 3 channels available

Substrate holder (optional):

aluminium, custom design possible

Vacuum connection:

DN 63 ISO-KF

Venting:

electromagnetic solenoid valve

Pump system:

up to 250m³/h

Chamber door:

you can choose between hinged-type with viewing port, drawer door or universal door

Kontakt aufnehmen und Beratung erhalten

If you have any questions about our services and offers, you can use the following form! We will contact you immediately.

Plasma Parylene Systems GmbH

Dorfstr. 3, 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

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