Plasma cleaning and polymerization tool (cluster system)

A robotic-powered, multi-chamber system for the most complex coating processes in a low-pressure environment.

Dimensions:
L: 2000mm W: 1800mm H: 2000mm
Weight:
~ 320 KG
Volume:
50 litres
3 process chambers:
VA L:300 W:300 H:300
Plasma source:
2,45 GHz, 1200 Watt / 13,56 MHz, 600 Watt
Inclusive:
3x3 gas channels (gas distribution system inside the process chamber)
Additionally:
air lock robot, example substrate holder for air lock
Substrate holder (optional):
Aluminum, customized design possible
Vacuum connection:
DN 63 ISO-KF
Venting:
electromagnetic solenoid valve
3 Pump systems:
40m³/h
Chamber door:
Maintenance chamber doors

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