Plasma cleaning and polymerization tool (cluster system)

A robotic-powered, multi-chamber system for the most complex coating processes in a low-pressure environment.

Dimensions:

L: 2000mm W: 1800mm H: 2000mm

Weight:

~ 320 KG

Volume:

50 litres

3 process chambers:

VA L:300 W:300 H:300

Plasma source:

2,45 GHz, 1200 Watt / 13,56 MHz, 600 Watt

Inclusive:

3x3 gas channels (gas distribution system inside the process chamber)

Additionally:

air lock robot, example substrate holder for air lock

Substrate holder (optional):

Aluminum, customized design possible

Vacuum connection:

DN 63 ISO-KF

Venting:

electromagnetic solenoid valve

3 Pump systems:

40m³/h

Chamber door:

Maintenance chamber doors

Kontakt aufnehmen und Beratung erhalten

If you have any questions about our services and offers, you can use the following form! We will contact you immediately.

Plasma Parylene Systems GmbH

Dorfstr. 3 , 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

© 2022 – Plasma Parylene Systems GmbH – All rights reserved.

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