Plasma cleaning and polymerization tool (cluster system)
A robotic-powered, multi-chamber system for the most complex coating processes in a low-pressure environment.
A robotic-powered, multi-chamber system for the most complex coating processes in a low-pressure environment.
| Dimensions: | L: 2000mm W: 1800mm H: 2000mm |
| Weight: | ~ 320 KG |
| Volume: | 50 litres |
| 3 process chambers: | VA L:300 W:300 H:300 |
| Plasma source: | 2,45 GHz, 1200 Watt / 13,56 MHz, 600 Watt |
| Inclusive: | 3x3 gas channels (gas distribution system inside the process chamber) |
| Additionally: | air lock robot, example substrate holder for air lock |
| Substrate holder (optional): | Aluminum, customized design possible |
| Vacuum connection: | DN 63 ISO-KF |
| Venting: | electromagnetic solenoid valve |
| 3 Pump systems: | 40m³/h |
| Chamber door: | Maintenance chamber doors |
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