A system with the diameter of our Q240S but with reduced chamber depth for the sake of saving space.
Dimensions: | L: 620mm W: 550mm H: 500mm |
Weight: | 75 KG |
Volume: | 9 Liter |
Process chamber: | Quarzglas, 240mm Ø , B: 244mm |
Microwave output: | 2,45 GHz / 50 - 1200 Watt |
Inclusive: | 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available |
Substrate holder (optional): | aluminium, custom design possible |
Vacuum connection: | DN 40 ISO-KF |
Venting: | electromagnetic solenoid valve |
Pump system: | up to 25m³/h |
Chamber door: | you can choose between hinged-type with viewing port and drawer door with attached support rods |
Wafer size: | up to 150mm, at a number of 25 wafers |
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