Q 240S

A system with the diameter of our Q240S but with reduced chamber depth for the sake of saving space.


L: 620mm W: 550mm H: 500mm


75 KG


9 Liter

Process chamber:

Quarzglas, 240mm Ø , B: 244mm

Microwave output:

2,45 GHz / 50 - 1200 Watt


1 gas channel (gas distribution system inside the process chamber), up to 3 channels available

Substrate holder (optional):

aluminium, custom design possible

Vacuum connection:



electromagnetic solenoid valve

Pump system:

up to 25m³/h

Chamber door:

you can choose between hinged-type with viewing port and drawer door with attached support rods

Wafer size:

up to 150mm, at a number of 25 wafers

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Plasma Parylene Systems GmbH

Dorfstr. 3, 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

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