Q150 (Tabletop Unit)
Easy to operate and simple to load. Our Q-series provides fast and reliable plasma processing.
L: 500mm W: 550mm H: 370mm
Quarzglas, 150mm Ø, B: 244mm
2,45 GHz / 50 - 1200 Watt
1 gas channel (gas distribution system inside the process chamber), up to 3 channels available
|Substrate holder (optional):|
aluminium, custom design possible
DN 25 ISO-KF
electromagnetic solenoid valve
up to 25m³/h
you can choose between hinged-type with viewing port and drawer door with attached support rods
up to 125mm, at a number of 25 wafers
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