Q150 (Tabletop Unit)

Easy to operate and simple to load. Our Q-series provides fast and reliable plasma processing.

Dimensions:

L: 500mm W: 550mm H: 370mm

Weight:

40 KG

Volume:

4 Liter

Process chamber:

Quarzglas, 150mm Ø, B: 244mm

Microwave output:

2,45 GHz / 50 - 1200 Watt

Inclusive:

1 gas channel (gas distribution system inside the process chamber), up to 3 channels available

Substrate holder (optional):

aluminium, custom design possible

Vacuum connection:

DN 25 ISO-KF

Venting:

electromagnetic solenoid valve

Pump system:

up to 25m³/h

Chamber door:

you can choose between hinged-type with viewing port and drawer door with attached support rods

Wafer size:

up to 125mm, at a number of 25 wafers

Kontakt aufnehmen und Beratung erhalten

If you have any questions about our services and offers, you can use the following form! We will contact you immediately.

Plasma Parylene Systems GmbH

Dorfstr. 3 , 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

© 2022 – Plasma Parylene Systems GmbH – All rights reserved.

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