Easy to operate and simple to load. Our Q-series provides fast and reliable plasma processing.
Dimensions: | L: 500mm W: 550mm H: 370mm |
Weight: | 40 KG |
Volume: | 4 Liter |
Process chamber: | Quarzglas, 150mm Ø, B: 244mm |
Microwave output: | 2,45 GHz / 50 - 1200 Watt |
Inclusive: | 1 gas channel (gas distribution system inside the process chamber), up to 3 channels available |
Substrate holder (optional): | aluminium, custom design possible |
Vacuum connection: | DN 25 ISO-KF |
Venting: | electromagnetic solenoid valve |
Pump system: | up to 25m³/h |
Chamber door: | you can choose between hinged-type with viewing port and drawer door with attached support rods |
Wafer size: | up to 125mm, at a number of 25 wafers |
If you have any questions about our services and offers, you can use the following form! We will contact you immediately.
© 2022 – Plasma Parylene Systems GmbH – All rights reserved.
