Breaking boundaries with
Alpha plasma

The owner and managing director, Hans-Dieter Voss, has a degree in physics and engineering as well as more than 35 years of experience in the field of plasma technology, low-pressure polymer coating and development of those technologies.

You too can benefit from our experience and professional know-how

Let our experts advise you.

We have often been able to custom-manufacture machines and systems that our customers thought were not feasible.

We are happy to develop a tailor-made solution that perfectly fits your requirements.

We develop your solution both on the system and on the process side.

Our powerful plasma system and special accessories

Plasma systems:

AL series plasma systems

AL stands for aluminum chamber. It is mainly used in the semiconductor, solar, plastics and electronics industries.

AL 76 Tabletop Unit

A space-saving system designed for smaller production facilities and laboratories. Available as compact or tabletop.

AL 235

With automated door and adjustable work height for easier loading.

AL 800 Compact

The absolute biggest AL-system we have to offer. For the largest substrates and quantities.

Q150 (Tabletop Unit)

Easy to operate and simple to load. Our Q-series provides fast and reliable plasma processing.

Q 240S

A system with the diameter of our Q240 but with reduced chamber depth for the sake of saving space.

Q 240

The biggest system in our Q-series. Perfect for multiple Wafers with sizes up to 200mm diameter.

Special accessories:

ECR rack

Concentrated, more effective surface treatment and plasma generation.

Heating table

This table allows the substrates placed on it to remain above a certain temperature level during coating or plasma treatment. Can be combined with wafer holders.

Cooling table

Similar to the heating table, this extra allows the substrates to be cooled as needed or maintained at a specific temperature level during treatment.

Wafer holder

We offer several sizes of wafer holders that can be placed on our heating/cooling tables to hold wafers in place during ultracleaning or analysis.

Our system product catalogue

Download our product catalogue by clicking on the following button: “DOWNLOAD PRODUCT CATALOGUE”.

Get in touch with us for advice

If you have any questions about our services and offers, you can use the following form! We will get back to you as soon as possible.

Plasma Parylene Systems GmbH

Dorfstr. 3 , 83026 Rosenheim / Pang

Certified according to

DIN EN ISO 9001:2015
DIN EN ISO 13485:2016

© 2022 – Plasma Parylene Systems GmbH – All rights reserved.

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